Orbis 1000

A single-wafer vacuum loadlock which integrates with the XERIC Oxide Etch, XERIC Silicon Etch and the AURIX coating modules. Designed for commercial R&D and pilot line MEMS production, the ORBIS 1000 features fully-automated processing that dramatically improves cycle time between wafers, providing the ideal level of productivity for commercial development and low-volume production. The 1000 can be updated to the full ORBIS 3000 platform at a later date.