Orbis Alpha

Memsstar’s propriety range of new generation ORBIS platforms provide reliable, cost effective solutions for advanced processing from research, to commercial R&D through to high volume manufacturing providing a seamless transfer from lab to fab. A low cost and compact footprint platform enabling the development of production-capable processes for the next MEMS generation devices within R&D. The Alpha Silicon Etch provides continuous flow design for etch materials and has high selectivity towards SiO2, Si3N4. The Alpha Oxide Etch offers complete abatement solutions and a gas detection system. It benefits from market leading selectivities towards Si3N4 and is compatible with a wide range of materials.