Oxid 3000

Fully automated wafer handling platform enabling full process integration for volume MEMS manufacturing. With a proven track record in high volume production, the ORBIS 3000 platform provides fully automated single wafer processing. Its cluster capability allows for any combination of memsstar’s XERIC and AURIX process modules. All process modules are based on memsstar’s unique technologies for advanced process control, faster process times, superior within-wafer uniformity; and wafer-to-wafer repeatability.